Fluorine-modified siloxanes become products that are very resistant to hydrocarbons, esters and oxidation. They can also be used in a wide temperature range (-60°C to 290°C). Fluorosilicones do not have methyl groups on their siloxane chains, but fluoroalkyd groups. This makes them even more temperature and oxidation resistant than all other siloxanes (PMPS). They come in the form of oils, fats and pastes. Fluore-siloxanes are used, among other things, as lubricants for extreme temperatures, defoamers, compressor and hydraulic oils.

Polymethyltrifluoropropylsilicones in particular have gained technical importance as fluorosilicone rubbers (short name MFQ or FMQ). They are used as starting products for vulcanizates with exceptionally high resistance to fuels, oils and chemicals.